Piezoelectric thin films for MEMS
2023
Details
Title
Piezoelectric thin films for MEMS
Author(s)
Kanno, Isaku ; Ouyang, Jun ; Akedo, Jun ; Yoshimura, Takeshi ; Malic, Barbara ; Muralt, Paul
Published in
Applied Physics Letters
Volume
122
Issue
9
Pages
090401
Date
2023-02-27
Publisher
Melville, AIP Publishing
ISSN
0003-6951
1077-3118
1077-3118
Keywords
Other identifier(s)
View record in Web of Science
Laboratories
LC
Record Appears in
Scientific production and competences > STI - School of Engineering > STI Archives > LC - Ceramics Laboratory
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Peer-reviewed publications
Work produced at EPFL
Journal Articles
Published
Record creation date
2023-03-27